Method and device for determining the diameter of an electron beam

摘要

The arrangement has two wires formed as wire sensors and firmly arranged parallel to each other. The wires are electrically insulated against a coolable base plate, and comprise a forwarding unit that forwards a measurement signal to an evaluation unit. The wires are made from tungsten, tantalum and molybdenum. Diameter of each wire is in a range between 0.1 and 0.5 mm. The wires are firmly connected with the base plate over two respective ceramic bushings (5, 6) exhibiting respective spacers. The wires are arranged at equal distance to the plate with respect to midpoints of the wires. An independent claim is also included for a method for measuring of diameter of an electron beam.