Apparatus for Transferring Substrate

摘要

PURPOSE: A substrate transfer device is provided to improve the space availability of a manufacturing facility by reversing a substrate. CONSTITUTION: A flipper(400) includes a plurality of receiving grooves(410) which receive a substrate to reveres the substrate transferred by a conveyor. The receiving groove is formed along the outer circumference of the flipper. The flipper rotates around a rotation shaft(300) which is arranged in a transfer path of the substrate. A through hole is formed in the rotation shaft to pass the substrate. A guide hole faces the through hole to pass the substrate.