| 摘要 |
<p>PURPOSE: A panel transferring device for a vacuum chamber is provided to accurately lift and drop a driving device by preventing a horizontal failure phenomenon of a panel or particles. CONSTITUTION: A plurality of feed through units(300) are combined with a vacuum chamber. A driving unit(500) is connected to the feed through unit and simultaneously operates each feed through unit. A plurality of first and second magnets are installed in the inner and outer sides of a rod and forms a magnetic field to apply an attractive force. A hollow through body(350) includes a connection unit to be connected to the vacuum chamber. A fixed block slides in the outer side of the through body and mounts a first magnet. A second magnet corresponding to the first magnet is fixed to an actuator.</p> |
