发明名称 A SCHOTTKY DEVICE
摘要 <p>A device according to the invention comprises a Schottky barrier formed by a metal-semiconductor junction between a semiconductor nanowire (1) and a metal contact (5). The metal contact (5) at least partly encloses a circumferential area of each nanowire (1) along the length thereof. The nanowire (2) comprises a lowly doped region that is part of the metal-semiconductor junction. This lowly doped region can be formed by a nanowire segment, by the entire nanowire or in a core-shell configuration with a highly doped nanowire core (3) and the lowly doped region comprised in a shell (4). The device can be fabricated using a method according to the invention, where two different growth modes are used, the first comprising axial growth from a substrate (2) giving a suitable template for formation of the metal-semiconductor junction and the second step comprising radial growth enabling control of the doping levels in the lowly doped region.</p>
申请公布号 EP2412028(A1) 申请公布日期 2012.02.01
申请号 EP20100756429 申请日期 2010.03.25
申请人 GLO AB 发明人 KONSEK, STEVEN
分类号 H01L29/872;H01L29/06 主分类号 H01L29/872
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