| 摘要 |
PURPOSE: An etchant feeder using a static mixer is provided to prevent a substrate from being damaged by automatically stopping an etchant supply if the density of the etchant is changed. CONSTITUTION: A mixing unit includes an inlet, an outlet, and a static mixer(110). The static mixer generates a uniform mixture by mixing etchant with water. An etchant supply unit(500) is connected to the inlet of the mixing unit and supplies etchant. A water supply unit(510) is connected to the inlet of the mixing unit and supplies water. A control unit controls the etchant supply unit and the water supply unit to control the amount of etchant and water.
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