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发明名称
摘要
申请公布号
JP4866347(B2)
申请公布日期
2012.02.01
申请号
JP20070519255
申请日期
2005.06.14
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发明人
分类号
H01L21/3065;H01L21/304;H05H1/46
主分类号
H01L21/3065
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