| 摘要 |
<p>The device comprises an optical system having an optical axis (15) that emits a beam bundle (3) along the optical axis, and/or a peripheral mirror system axis (9) that has a workpiece axis around a workpiece (8) to be processed. The peripheral mirror system axis and the workpiece axis are aligned in same direction. The peripheral mirror has a beam inlet opening at the peripheral to which the optical system is arranged so that the beam bundle is coupled with the optical axis vertical to the peripheral mirror system axis in the peripheral mirror. The device comprises an optical system having an optical axis (15) that emits a beam bundle (3) along the optical axis, and/or a peripheral mirror system axis (9) that has a workpiece axis around a workpiece (8) to be processed. The peripheral mirror system axis and the workpiece axis are aligned in same direction. The peripheral mirror has a beam inlet opening at the peripheral to which the optical system is arranged so that the beam bundle is coupled with the optical axis vertical to the peripheral mirror system axis in the peripheral mirror and impinges on the workpiece at the peripheral mirror (5) after several reflexion. The peripheral mirror is surrounded by a processing chamber that has a beam inlet opening and/or two discharge openings through which the workpiece to be processed is guided in the direction of its workpiece axis through the processing chamber. The optical system comprises a first beam formation optic for diameter variation and parallelization of the beam bundle emitted by laser. The optical system comprises two beam formation optics for focusing the beam bundle in X-Y plain, where the vertical plain is Y-Z plain defined to the peripheral mirror system axis through the optical axis. The two beam formation optics are laid out so that a focus line lies in a beam inlet opening. The peripheral mirror has the form of a hollow body, whose interior cover area forms a mirror surface, whose surface normal stands in each point of the mirror surface vertically on the peripheral mirror system axis. The surface normal of the mirror surface has an angle of less than 90[deg] , with the peripheral mirror system axis. The mirror surface consists of part areas that include corners, whose number, geometry and arrangement are determined to each other for the cross-section of the peripheral mirror. The mirror surface is a cone cylindrical surface. Polygons with same edge length and same interior angles are formed through the part areas. An additional mirror element is arranged in the interior of the peripheral mirror and is a rotating polygon mirror. The workpiece axis is arranged in the peripheral mirror system axis. A corner or a part area is formed as spherical or aspherical area. An additional beam inlet openings and a second optical system are provided to couple two beam bundles in the peripheral mirror. The second optical system comprises a laser that emits a beam bundle with another wavelength as the laser of the first optical system. A movement arrangement is arranged to produce a relative movement between the optical system, the peripheral mirror and the workpiece in the direction of the workpiece axis. An independent claim is included for a method for peripheral processing of workpieces by laser.</p> |
