发明名称 Methods for forming a transistor and modulating channel stress
摘要 Methods are provided for manufacturing transistors and altering the stress in the channel region of a single transistor. One or more parameters that are effect stress in the channel region are altered for a single transistor to increase or decrease the channel stress in PMOS and NMOS transistors.
申请公布号 US8105908(B2) 申请公布日期 2012.01.31
申请号 US20050165282 申请日期 2005.06.23
申请人 THIRUPAPULIYUR SUNDERRAJ;NOURI FARAN;WASHINGTON LORI;APPLIED MATERIALS, INC. 发明人 THIRUPAPULIYUR SUNDERRAJ;NOURI FARAN;WASHINGTON LORI
分类号 H01L21/336 主分类号 H01L21/336
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