发明名称 |
Triple-axis MEMS accelerometer having a bottom capacitor |
摘要 |
An integrated circuit structure includes a substrate having a top surface; a first conductive layer over and contacting the top surface of the substrate; a dielectric layer over and contacting the first conductive layer, wherein the dielectric layer includes an opening exposing a portion of the first conductive layer; and a proof-mass in the opening and including a second conductive layer at a bottom of the proof-mass. The second conductive layer is spaced apart from the portion of the first conductive layer by an air space. Springs anchor the proof-mass to portions of the dielectric layer encircling the opening. The springs are configured to allow the proof-mass to make three-dimensional movements. |
申请公布号 |
US8106470(B2) |
申请公布日期 |
2012.01.31 |
申请号 |
US20100751633 |
申请日期 |
2010.03.31 |
申请人 |
WU TING-HAU;CHENG CHUN-WEN;CHENG CHUN-REN;TSAI SHANG-YING;PENG JUNG-HUEI;LEE JIOU-KANG;CHANG ALLEN TIMOTHY;TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
发明人 |
WU TING-HAU;CHENG CHUN-WEN;CHENG CHUN-REN;TSAI SHANG-YING;PENG JUNG-HUEI;LEE JIOU-KANG;CHANG ALLEN TIMOTHY |
分类号 |
H01L21/32 |
主分类号 |
H01L21/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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