发明名称 Semiconductor device having a saddle fin shaped gate and method for manufacturing the same
摘要 A semiconductor device having a saddle fin gate and a method for manufacturing the same are presented. The semiconductor device includes a semiconductor substrate, an isolation structure, and gates. The semiconductor substrate is defined with first grooves in gate forming areas. The isolation structure is formed in the semiconductor substrate and is defined with second grooves which expose front and rear surfaces of the gate forming areas. The gates are formed within the first grooves in the gate forming areas. Gates are also formed in the second grooves of the isolation structure to cover the exposed front and rear surfaces of the gate forming areas. The second grooves are wider at the lower portions that at the upper portions.
申请公布号 US8106450(B2) 申请公布日期 2012.01.31
申请号 US20090467351 申请日期 2009.05.18
申请人 BAEK SEUNG JOO;HYNIX SEMICONDUCTOR INC. 发明人 BAEK SEUNG JOO
分类号 H01L27/088;H01L21/8234 主分类号 H01L27/088
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