发明名称 Semiconductor device and method of fabricating the same including forming pillar neck patterns
摘要 A semiconductor device and method of fabricating the same includes preparing a substrate, forming a plurality of conductive layer patterns on the substrate, forming a gate insulation layer on sidewalls of the conductive layer patterns, forming a pillar neck pattern between the conductive layer patterns, forming a pillar head over the pillar neck pattern and the conductive layer patterns, and forming a gate electrode surrounding the pillar neck pattern and forming a pillar head pattern by selectively etching the conductive layer patterns and the pillar head formed over the pillar neck pattern.
申请公布号 US8105918(B2) 申请公布日期 2012.01.31
申请号 US20080318176 申请日期 2008.12.23
申请人 KIM MYUNG-OK;HYNIX SEMICONDUCTOR INC. 发明人 KIM MYUNG-OK
分类号 H01L21/20;H01L21/3205;H01L21/36;H01L21/4763 主分类号 H01L21/20
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