发明名称 Transmission electron microscopy sample etching fixture
摘要 A mask fixture for etching an item includes: a top fixture disposed over the item, including a reservoir centered within the top fixture for containing an etchant; a bottom fixture underneath the item to be etched including a recessed surface area centered within the bottom fixture; and an etch-resistant window for holding the item to be etched, the etch-resistant window disposed entirely within the recessed surface area. In addition, a small via centered within and intersecting both the top and bottom fixtures acts as a path for a high intensity light beam.
申请公布号 US8105499(B2) 申请公布日期 2012.01.31
申请号 US20080172876 申请日期 2008.07.14
申请人 ELLIS ARTHUR WOOD;INTERNATIONAL BUSINESS MACINES CORPORATION 发明人 ELLIS ARTHUR WOOD
分类号 G01R31/00 主分类号 G01R31/00
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