| 发明名称 |
Semiconductor electrically programmable fuse element with amorphous silicon layer after programming and method of programming the same |
| 摘要 |
A fuse link is formed between first and second terminals. The first and second terminals and fuse link have a polysilicon layer and a layer formed on the polysilicon layer and containing a metal element. At least a portion of the fuse link is an amorphous silicon layer. |
| 申请公布号 |
US8105886(B2) |
申请公布日期 |
2012.01.31 |
| 申请号 |
US20080099422 |
申请日期 |
2008.04.08 |
| 申请人 |
OTSUKA NOBUAKI;SASAKI TAKAHIKO;FUJII SHUSO;KABUSHIKI KAISHA TOSHIBA |
发明人 |
OTSUKA NOBUAKI;SASAKI TAKAHIKO;FUJII SHUSO |
| 分类号 |
H01L21/00;H01L27/04;H01L21/82;H01L21/822;H01L21/8242;H01L23/525;H01L27/10;H01L27/108;H01L29/00 |
主分类号 |
H01L21/00 |
| 代理机构 |
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代理人 |
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