发明名称 |
Gas supply unit and gas supply system |
摘要 |
A gas supply unit and a gas supply system that are small-sized and inexpensive. The gas supply unit is installed on operation gas conveyance pipeline and has fluid control devices communicated via flow path blocks and controlling operation gas. The gas supply unit has the first flow path block, to one side of which an inlet open/close valve included in the fluid control devices is attached, and also has the second flow path block, to one side of which a purge valve included in the fluid control devices is attached. The first flow path block and the second flow path block are layered in the direction perpendicular to the conveyance direction of the operation gas. The inlet open/close valve and the purge valve are arranged between a mass flow controller installed on the operation gas conveyance pipeline and an installation surface where the unit is installed. |
申请公布号 |
US8104516(B2) |
申请公布日期 |
2012.01.31 |
申请号 |
US20060226416 |
申请日期 |
2006.06.02 |
申请人 |
MORIYA SHUJI;NAGAOKA HIDEKI;OKABE TSUNEYUKI;ITAFUJI HIROSHI;DOI HIROKI;ITO MINORU;CKD CORPORATION;TOKYO ELECTRON LIMITED |
发明人 |
MORIYA SHUJI;NAGAOKA HIDEKI;OKABE TSUNEYUKI;ITAFUJI HIROSHI;DOI HIROKI;ITO MINORU |
分类号 |
F16K11/10 |
主分类号 |
F16K11/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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