APPARATUS FOR PRODUCING HIGH CONCENTRATION AND PURIFICATION OZONE GAS WITH MICRO DISCHARGE GAP

摘要

PURPOSE: A flat type high concentration and high purity ozone generating apparatus is provided to prevent the exposure of a metal electrode in a discharging space and to minimize the size of the apparatus. CONSTITUTION: Electrics(11, 12) are oppositely installed to form discharging pores through which raw gas and oxygen are introduced. Electrode parts(21, 22) are attached to the upper side of a first dielectric and the bottom side of a second dielectric and induces discharging in the discharging pores to generate ozone. Cooling jackets are installed at the external sides of the electrode parts to cool the electrode parts and forms coolant flow paths.