发明名称 |
Defect review apparatus and method of reviewing defects |
摘要 |
A review apparatus for reviewing a specimen by moving the specimen to pre-calculated coordinate includes: a function to measure a deviation amount between the pre-calculated coordinates and coordinates of an actual position of the specimen; a function to optimize a coordinate correcting expression to minimize the measured deviation amount; and a function to determine that the deviation amounts have converged. When the deviation amounts have converged, the measurement for the coordinate-correcting-expression optimization is terminated, and a field of view necessary for the specimen to be within the field of view is set according to a convergence value of the calculated deviation amount. |
申请公布号 |
US8108172(B2) |
申请公布日期 |
2012.01.31 |
申请号 |
US20100953170 |
申请日期 |
2010.11.23 |
申请人 |
HIRAI TAKEHIRO;OBARA KENJI;YAMAGUCHI KOHEI;HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
HIRAI TAKEHIRO;OBARA KENJI;YAMAGUCHI KOHEI |
分类号 |
G01C17/38;G01N21/86;G01N23/225 |
主分类号 |
G01C17/38 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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