| 摘要 |
A unique X, Y, &thetas; (Rotary) positioning system is disclosed that may include a machine base assembly with a substrate slide moving on the machine base with either a recirculating or air bearing in Y direction and two integrated cross stages attached to the slide which can kinetically provide large movements of the slide relative to the base in the X direction as well as generating large motion of the slide in the rotary &thetas; direction about a virtual center of rotation. The positioning system allows a user to position large format glass substrates and the like with precision control. Specifically, depending on the mounting configuration of the present invention, a user may correct for straightness in X, X′ and Y directions, yaw in the A rotation direction and position in the X, X′ and Y direction. |
