| 摘要 |
<p>Abstract Plasma Processing Chamber Component Having Adaptive Thermal Conductor An assembly comprises a component of a plasma process chamber, a thermalsource and a polymer composite therebetween exhibiting a phase transition between a high-thermal conductivity phase and a low-thermal conductivity phase. The temperature-induced phase change polymer can be used to maintain the temperature•of the component at a high or low temperature during multi-step plasma etchingprocesses.Fig. 4</p> |
