<p>Provided is a probe card which has a space transformer which may be effectively changed to correspond to a change in wafer chip structure and is capable of maximizing acceptable channels of the space transformer. The probe card for testing a semiconductor chip on a wafer includes: a space transformer body in which a plurality of unit probe modules are arranged at intervals; a main circuit board to which an electrical signal is applied from an external test device; a reinforcement plate for supporting the main circuit board such that the unit probe modules become stable against an external effect; a standing conductive medium which is inserted into a penetration portion provided in the space transformer body; a lower surface circuit board in which the standing conductive medium is electrically connected to the unit probe module as a flexible conductive medium and the standing conductive media are mounted; and a mutual connection member for electrically connecting the lower surface circuit board to the main circuit board.</p>
申请公布号
SG176767(A1)
申请公布日期
2012.01.30
申请号
SG20110091303
申请日期
2010.04.22
申请人
AMST CO., LTD.
发明人
SHIM, YUN HEE;YOON, SUNG HEE;YOO, SEUNG HO;SONG, BYUNG CHANG;CHUNG, IN BUHM;KIM, DONG IL