发明名称 |
AN ACTIVE VIBRATION ISOLATION AND DAMPING SYSTEM |
摘要 |
An active vibration isolation and damping system (11) comprising a payload (12) that has to be isolated or damped, a vibration sensor (14) for detecting a vibration of the payload, an actuator (15) for moving the payload relative to a bearing body (13) supporting the payload, and a controller (16) for providing the actuator with a signal that is representative for the vibration. The system provides a solution for the tilting problem by applying a vibration sensor that has a low stiffness connection to the payload (12) for rotation along an axis (17) perpendicular to the gravitational force (18), and a high stiffness connection to the payload (12) for the vibration detectable with the vibration sensor. |
申请公布号 |
SG176803(A1) |
申请公布日期 |
2012.01.30 |
申请号 |
SG20110091782 |
申请日期 |
2010.06.11 |
申请人 |
NEDERLANDSE ORGANISATIE VOOR TOEGEPAST- NATUURWETENSCHAPPELIJK ONDERZOEK TNO |
发明人 |
RIJNVELD, NIEK;VAN DEN DOOL, TEUNIS CORNELIS |
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