METHODS OF FORMING A FLOATING JUNCTION ON A SOLAR CELL WITH A PARTICLE MASKING LAYER

摘要

A method of forming a floating junction on a substrate includes depositing a set of masking particles on the rear surface of a substrate in a set of patterns and heating the substrate to create a particle masking layer. The substrate is exposed to a phosphorous deposition wherein a front surface PSG layer, a front surface phosphorous diffusion, a rear surface PSG layer, and a rear surface phosphorous diffusion are formed, and wherein a first phosphorous dopant surface concentration in the substrate proximate to the set of patterns is less than a second dopant surface concentration in the substrate not proximate to the set of patterns. The substrate is further exposed to a set of etchants wherein the front surface PSG layer and the rear surface PSG layer are removed; depositing front and rear surface SiNx layers; and forming a rear metal contact on the rear surface through the rear surface SiNx layer.