| 摘要 |
<P>PROBLEM TO BE SOLVED: To adjust a vibration characteristic of a vibrator while ensuring a stable characteristic and high strength. <P>SOLUTION: A vibration type gyro sensor includes a vibration type gyro sensor element in which a piezoelectric film, a driving electrode, a pair of detection electrodes, and a wiring connection terminal are formed on one surface thereof; and a support substrate on which a land is formed for mounting the vibration type gyro sensor element. The vibration type gyro sensor element has a cantilever shaped vibrator, is mounted on the support substrate with the one face directed to the support substrate, and includes an area other than the one face as an area to be processed in which a concave is formed for adjusting the vibration characteristic of the vibrator. <P>COPYRIGHT: (C)2012,JPO&INPIT |
