| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vacuum pump that can efficiently be heated. <P>SOLUTION: The vacuum pump includes: a casing having an inlet port; a cylindrical rotor part provided in a rotary body; a drag pump part including a cylindrical stator disposed with gaps outside the cylindrical rotor part; a base having an exhaust port; and a resistance heater for heating the stator embedded in the base. <P>COPYRIGHT: (C)2012,JPO&INPIT |
