| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a magnifying observation device allowing an electron microscope side to stably observe the situation in a chamber of a rotating magnifying observation device at any rotation position. <P>SOLUTION: A magnifying observation device comprises: inner sample chamber observation means 13 for acquiring an inner sample chamber image which observes the environment in a sample chamber; and display means for the inner sample chamber image taken by the inner sample chamber observation means 13. A trunk part 24 comprises: a rotation part which moves by a rotation of the trunk part 24 through rotation means 30 in the sample chamber; and a fixed part which does not move even when the trunk part 24 is rotated through the rotation means 30. The inner sample chamber observation means 13 is fixed to the fixed part. Due to this configuration, the inner sample chamber observation means 13 does not move even when the trunk part 24 is rotated, which enables stable inner sample chamber observation without making the inner sample chamber image rotate in accordance with the rotation of the trunk part 24. For example, observation can be made so that a lens barrel tip of electron beam imaging means 11 cannot contact a sample. <P>COPYRIGHT: (C)2012,JPO&INPIT |
