| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve such a problem that the operation is required while manually switching the filter coefficient setting and the detector setting in accordance with a sample when deciding an observation point, thereby automatically setting an integration ratio of an inter-frame operation from a setting table of the integrated ratio to largely simplify manual setting during operation to improve operability during a trial-and-error operation. <P>SOLUTION: Differences in installation position of a detector and in detection system depending on a device, and a difference in signal due to a composition of an observation sample are determined from histogram, an integration ratio of an inter-frame operation is automatically set from a setting table of the integrated ratio to enable display of an observation image most suitable for operation, and the manual setting of the integration ratio by an operator can be largely simplified, thereby improving operability during the trial-and-error operation. <P>COPYRIGHT: (C)2012,JPO&INPIT |
