| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an apparatus and method of inspecting a quartz glass crucible for silicon single crystal pulling which detect only impurity component contained in an outermost surface layer of a surface of the crucible by irradiating a laser beam, specifying the impurity component from wavelength and intensity of fluorescence generated by the irradiation and calculating a content of the impurity component. <P>SOLUTION: The apparatus includes: a light emission fiber 4 for guiding a laser beam; a light receiving fiber 6 for receiving fluorescence from an inner surface of the quartz glass crucible; a detector 9 for detecting the fluorescent intensity of the light of a prescribed wavelength dispersed by a spectroscope 7; a computer 10 for specifying an impurity component and calculating a content of the impurity component on the basis of the fluorescent intensity data of the fluorescent wavelength corresponding to the required impurity component and the content of the impurity component; and a matching oil supplying pipe 13a for forming a thin film of matching oil having a higher refractive index than the quartz glass in an inner surface of the quarts glass crucible. <P>COPYRIGHT: (C)2012,JPO&INPIT |
