| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a screen printer accurately inspecting foreign matter on a substrate regardless of the level of printing pressure and a method for detecting foreign matter in the screen printer. <P>SOLUTION: The screen printer includes: a load cell 76 detecting load P in the axial direction of a squeegee lifting/lowering shaft 61; and a linear scale 77 detecting a position T in the vertical direction of a squeegee 14 with respect to a squeegee base 60. When the squeegee 14 is slid on a mask 13, the variation ΔP is determined based on the load P in the axial direction of the squeegee lifting/lowering shaft 61 detected by the load cell 76, or the variation ΔT is determined based on the position T in the vertical direction of the squeegee 14 with respect to the squeegee base 60 detected by the linear scale 77, so as to detect foreign matter Q on the substrate 2. <P>COPYRIGHT: (C)2012,JPO&INPIT |
