| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a glass substrate processing unit using laser beam cutting down the processing time with low-price constitution. <P>SOLUTION: This unit includes a worktable 2 on which a glass substrate 2 to be processed is mounted, a laser beam output part 15 from which laser beam is outputted, first wedge prisms 321, 322 to deflect the laser beam emitted from the laser beam output part and a first hollow motor 17 to drive them, a collecting lens 35 and a second hollow motor 18 having second wedge prisms 341, 342. A pair of first wedge prisms 321, 322 have mutually different refractive indices, and their facing adjacent surfaces are parallel and their opposite faces are also set parallel and the center of gravity of the pair of the whole wedge prisms is on their axis of rotation. <P>COPYRIGHT: (C)2012,JPO&INPIT |
