| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for cleaning a silica glass crucible for pulling a silicon single crystal, by which the occurrence of fine unevenness in the crucible inner surface is suppressed and dust and impurities are efficiently removed in one cycle in order to suppress the occurrence of brown mold that is a cause of reduction in yield of the silicon single crystal caused by crucible. <P>SOLUTION: In the method for cleaning a silica glass crucible, the inner surface of the silica glass crucible is cleaned in the order of a step of cleaning the inner surface with pure water, a step of cleaning the inner surface with a surfactant, a step of cleaning the inner surface with an aqueous fluoronitric acid solution having a concentration of 0.2-1 wt.%, and a step of cleaning the inner surface with pure water. <P>COPYRIGHT: (C)2012,JPO&INPIT |
