发明名称 |
DEPOSITION OF VISCOUS MATERIAL |
摘要 |
Embodiments of the invention provide methods and systems for depositing a viscous material on a substrate surface. In one embodiment, the invention provides a method of depositing a viscous material on a substrate surface, the method comprising: applying a pre-wet material to a surface of a substrate; depositing a viscous material atop the pre-wet material; rotating the substrate about an axis to spread the viscous material along the surface of the substrate toward a substrate edge; and depositing additional pre-wet material in a path along the surface and adjacent the spreading viscous material. |
申请公布号 |
US2012021609(A1) |
申请公布日期 |
2012.01.26 |
申请号 |
US20100843123 |
申请日期 |
2010.07.26 |
申请人 |
PARBHOO NITIN H.;SKORDAS SPYRIDON;INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
PARBHOO NITIN H.;SKORDAS SPYRIDON |
分类号 |
H01L21/46;B05C9/00;B05C11/08;B05D1/00;B05D3/12 |
主分类号 |
H01L21/46 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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