| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a grinding method that controls the oxidation of a grinding stone, and to provide a grinding device. <P>SOLUTION: The grinding method grinds a workpiece held on a chuck table by operating a grinding stone while feeding an inert gas in a grinding area where the grinding stone operates. <P>COPYRIGHT: (C)2012,JPO&INPIT |
