| 摘要 |
A three-dimensional shape measuring apparatus measures by analyzing an optical pattern projected to the measurement target, and luminance of the optical pattern. The apparatus includes a mounting stage having a reference plane of a height of the measurement target, a measurement head that projects the optical pattern, to the measurement target and reference plane, to capture images of the optical patterns, and a displacement portion displaces the measurement head in a height direction. A phase computing portion computes a phase of the optical pattern in a certain pixel included in the captured image. A height computing portion computes a height of the measurement target based on the phase, and a feed amount computing portion computes a displacement amount based on the height. The height computing portion computes the height based on the phase and corrects the height based on the displacement amount, thereby computing the height of the measurement target.
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