MULTILAYER REFLECTIVE FILM COATED SUBSTRATE FOR A REFLECTIVE MASK, REFLECTIVE MASK BLANK, AND METHODS OF MANUFACTURING THE SAME

摘要

By forming on a substrate a reference point mark having a concave or convex shape with its side walls being generally upright, even if a multilayer reflective film, an absorber film, and so on are formed over the reference point mark, sufficient contrast for inspection light is obtained so that the position of the reference point mark can be identified with high accuracy.