发明名称 DEPOSITION SYSTEM
摘要 <p>A selenium deposition system can improve the selenium vapor distribution. The system (100) includes a reservoir (10) of deposition material and a deposition chamber (50). A cracker section (60 and/or 70) is provided in order to crack clusters in the deposition material, eg selenium vapor.</p>
申请公布号 WO2012012376(A1) 申请公布日期 2012.01.26
申请号 WO2011US44453 申请日期 2011.07.19
申请人 FIRST SOLAR, INC;BECK, MARKUS, E.;BODKE, ASHISH;BONNE, ULRICH, ALEXANDER;BULLER, BENYAMIN;GARABEDIAN, RAFFI;MILSHTEIN, EREL;YU, MING, LUN 发明人 BECK, MARKUS, E.;BODKE, ASHISH;BONNE, ULRICH, ALEXANDER;BULLER, BENYAMIN;GARABEDIAN, RAFFI;MILSHTEIN, EREL;YU, MING, LUN
分类号 C23C14/06;C23C14/22 主分类号 C23C14/06
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