| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plate-shaped member transfer facility capable of carrying-out even any plate-shaped member from a plurality of juxtaposed plate-like members, by carrying in the plate-shaped member between two plate-shaped members of leaving a space at a dense storage pitch, without inserting an end effect into a substrate storage part of a rack. <P>SOLUTION: A stocker facility 1 includes the rack 21 in which glass plates 2 are stored side by side in the front-rear direction in a raised state and a stocker 4 which moves the glass plates 2 to the right and left and delivers and receives the glass plates between the rack 21 and itself. The stocker 4 has a base 5, a flipper 8, a slide member 16 and a drive member 18. The flipper 8 is configured so as to rotate around the axis L1 to the base 5 by a flipper drive mechanism 10, and to raise or lower the glass plates 2 placed there by rotating. The drive member 18 is rotatably provided to the slide member 16, and is configured so that the glass plates 2 are sent into the rack 21 by rotating. <P>COPYRIGHT: (C)2012,JPO&INPIT |
