| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a silica glass crucible for pulling a silicon single crystal, by which a crucible inner surface having a high OH-group concentration and high purity is formed at a low cost in order to prevent the liquid surface vibration of a polysilicon melt that is a cause of reduction in yield of the silicon single crystal caused by crucible and to suppress the occurrence of brown mold. <P>SOLUTION: In the manufacturing of a silica glass crucible having a straight body part and a bottom part, an inner layer is formed on the inner surface from an opening part to the straight body part of the crucible by depositing transparent silica glass by using a silica powder having particle diameters of 70-300 μm and an oxyhydrogen flame. <P>COPYRIGHT: (C)2012,JPO&INPIT |
