| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a machining method for uniformizing the thickness between a reference plane and a recessed plane. <P>SOLUTION: The strain-free precision working method by a radical reaction for working a workpiece by the radical reaction by relatively scanning the workpiece 20 with two or more recessed planes formed thereon and a working electrode 4 includes: a step of individually measuring the thickness between each of two or more recessed planes 31-36 of the workpiece 20 and the reference plane 22 in an almost center coordinate location of a plane to be worked; a step of making an approximate curve C consecutive in a scanning direction of the working electrode 4 for each of two or more recessed planes based on these measured values; a step of calculating the minimum value of the thickness from the approximate curve C; a step of calculating the thickness from the reference plane at an optional coordinate location based on the approximate curve C, and calculating the difference of the thickness from the reference plane of the optional coordinate location and the minimum value as the amount of working; and a step of calculating the scanning speed of the working electrode 4 based on the amount of working. A machining time is controlled based on the scanning speed. The thicknesses between two or more recessed planes and the reference plane 22 can be uniformized according to such a working method. <P>COPYRIGHT: (C)2012,JPO&INPIT |
