| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plotting method of plotting a fine pattern with high accuracy in a resist layer, a method of manufacturing a master using the plotting method, a method of manufacturing a stamper, and a method of manufacturing an information recording disk. <P>SOLUTION: A convexo-concave pattern 39 for a scanning type electronic microscope is formed in the section of an inside non-plotting area NEA1 or an outside non-plotting area NEA2 in a resist layer 36 of a worked body 30 equipped with the resist layer 36 formed in an annular plotting area EA, and also formed in the inside non-plotting area NEA1 or the outside non-plotting area NEA2, and the convexo-concave pattern 39 for the scanning type electronic microscope is observed by the scanning type electronic microscope, and the position of the focal point of an electronic beam is adjusted based on the result of the observation by the scanning type electronic microscope, and the section of the plotting area EA in the resist layer 36 is irradiated with the electronic beam, and the resist layer 36 is exposed with a prescribed plotting pattern. <P>COPYRIGHT: (C)2012,JPO&INPIT |
