| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a NO<SB POS="POST">x</SB>sensor which can inhibit reduction in detection accuracy of NO<SB POS="POST">x</SB>concentration even if moisture in measured gas varies (abruptly changes); and a manufacturing method thereof. <P>SOLUTION: A NO<SB POS="POST">x</SB>sensor 200 has an NO<SB POS="POST">x</SB>sensor element 100 comprising first pumping cells 22, 31, 32 for pumping out/in oxygen in measured gas introduced into a first measuring chamber 41 and for adjusting oxygen concentration in the first measuring chamber, and second pumping cells 24, 35, 36 through which a pump current flows depending on NO<SB POS="POST">x</SB>concentration in measured gas with the adjusted oxygen concentration flowing from the first measuring chamber into the NO<SB POS="POST">x</SB>measuring chamber. When changing moisture in the measured gas from 2 vol.% to 8 vol.%, in the NO<SB POS="POST">x</SB>sensor 200, variation in a NO<SB POS="POST">x</SB>concentration conversion value based on the pump current converges into plus or minus 5 ppm or less within 5 seconds, and a transient peak value of the NO<SB POS="POST">x</SB>concentration conversion value is 20 ppm or less. <P>COPYRIGHT: (C)2012,JPO&INPIT |
