| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vacuum pump in which the mounting phase of a control unit to a pump body can be easily changed. <P>SOLUTION: The vacuum pump includes: the pump body that has a rotor that is pivotally supported by a magnetic bearing; a control unit that is installed on a lower surface of the pump body, and controls the drive of the pump body; a connector device that is a connector that inputs and outputs the power and a control signal between the pump body and the control unit, and has a first connector member on a pump body side and a second connector member on a control unit side; and a connector mounting member that is a member on which the first connector member is set up and which is mounted coaxially with the pump shaft of the pump body, and that is mounted to the pump body for at least a first mounting phase and a second mounting phase. <P>COPYRIGHT: (C)2012,JPO&INPIT |
