| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a surface shape measurement apparatus and a surface shape measurement method capable of more accurately measuring the surface shape of a measured object in nm order in a relatively short time. <P>SOLUTION: The surface shape measurement apparatus SA of the present invention deals with three or more measuring points of a measured object Ob per one measurement spot MP. For example, the surface shape measurement apparatus SA executes the steps of: dividing a measuring light ML generated in a measuring light generation unit 1A into three measuring lights in a measuring unit 2A in order to irradiate each of three measuring points P1 to P3 with the measuring light ML; irradiating each of the three measuring points P1 to P3 of the measured object Ob with the divided measuring light ML1 to ML3; making a pair of reflected lights RL1, RL2 to interfere with each other as well as making a pair of reflected lights RL2, RL3 to interfere with each other so as to use a common reflected light RL2, where RL1 to RL3 are reflected lights of the measuring lights ML1 to ML3; and obtaining the surface shape of the measured object Ob based on a first interfering light IL1 and a second interfering light IL2 obtained by the above light interference. <P>COPYRIGHT: (C)2012,JPO&INPIT |
