| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a liquid jet head having a piezoelectric layer whose environmental load is low and crystals are strongly oriented on a (110) plane. <P>SOLUTION: This is a method of manufacturing a liquid jet head having a pressure generation chamber communicating with a nozzle opening which jets liquid and a piezoelectric element which varies the pressure in the pressure generation chamber. The method comprises: a process of forming a platinum film made of platinum which is preferentially oriented on a (111) plane; a process of forming a piezoelectric precursor film by using a composition for forming a piezoelectric film, which is made by adding propylene glycol to a mixed solution of a xylene solution of metal-organic compound including Bi, La, Fe or Mn, at least La, and a xylene solution of metal-organic compound including Fe, on the platinum film; a process of forming a piezoelectric layer by baking the piezoelectric precursor film; and a process of forming an electrode on the piezoelectric layer. <P>COPYRIGHT: (C)2012,JPO&INPIT |
