| 发明名称 |
SUBSTRATE PROCESSING APPARATUS CONTROL SYSTEM |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate processing apparatus control system capable of supplying appropriate data. <P>SOLUTION: The substrate processing apparatus control system includes a collection unit that collects data from each of components constituting a substrate processing apparatus. The collection unit comprises a buffer that temporarily stores collected data and means for rearranging data in chronological order based on the time data attached to the data stored in the buffer. <P>COPYRIGHT: (C)2012,JPO&INPIT |
| 申请公布号 |
JP2012019199(A) |
申请公布日期 |
2012.01.26 |
| 申请号 |
JP20110096790 |
申请日期 |
2011.04.25 |
| 申请人 |
HITACHI KOKUSAI ELECTRIC INC |
发明人 |
KATAOKA NORIHIKO;MORI SHINICHIRO |
| 分类号 |
H01L21/02 |
主分类号 |
H01L21/02 |
| 代理机构 |
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代理人 |
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| 主权项 |
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