| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a focusing method for an electron microscope and an electron microscope capable of well performing focusing. <P>SOLUTION: The method includes: calculating, in the state that an object lens current value is set to x<SB POS="POST">0</SB>+Δx, an image movement amount D<SB POS="POST">1</SB>from before to after electron beam inclination, by a focusing part 13; next, calculating, in the state that the object lens current value is set to x<SB POS="POST">0</SB>, an image movement amount D<SB POS="POST">2</SB>from before to after the electron beam inclination, by the focusing part 13; and next, calculating, in the state that the object lens current value is set to x<SB POS="POST">0</SB>-Δx, an image movement amount D<SB POS="POST">3</SB>from before to after the electron beam inclination, by the focusing part 13. Moreover, the method further includes calculating the object lens current value for bringing the object lens in the focused state based on the calculated image movement amounts D<SB POS="POST">1</SB>-D<SB POS="POST">3</SB>, by the focusing part 13. <P>COPYRIGHT: (C)2012,JPO&INPIT |
