发明名称 |
THIN FILM LAMINATED BODY, THIN FILM MAGNETIC SENSOR USING THE THIN FILM LAMINATED BODY AND METHOD FOR MANUFACTURING THE THIN FILM LAMINATED BODY |
摘要 |
<p>Relating to a thin film lamination and a thin film magnetic sensor using the thin film lamination and a method for manufacturing the thin film lamination that realizes a thin film conducting layer having high electron mobility and sheet resistance as an InAsSb operating layer. A thin film lamination is provided which is characterized by having an Al x In 1 - x Sb mixed crystal layer formed on a substrate, and an InAs x Sb 1 - x (0 < x ‰¤ 1) thin film conducting layer directly formed on the Al x In 1 - x Sb layer, in which the Al x In 1 - x Sb mixed crystal layer is a layer that exhibits higher resistance than the InAs x Sb 1 - x thin film conducting layer or exhibits insulation or p-type conductivity, and its band gap is greater than the InAs x Sb 1 - x thin film conducting layer, and the a lattice mismatch is+1.3% to -0.8%.</p> |
申请公布号 |
EP2099083(A4) |
申请公布日期 |
2012.01.25 |
申请号 |
EP20070832773 |
申请日期 |
2007.11.29 |
申请人 |
ASAHI KASEI KABUSHIKI KAISHA |
发明人 |
SHIBASAKI, ICHIRO;GEKA, HIROTAKA;OKAMOTO, ATSUSHI |
分类号 |
H01L43/06;C30B23/06;G01R33/07;G01R33/09;H01L29/201;H01L43/08;H01L43/10;H01L43/12;H01L43/14 |
主分类号 |
H01L43/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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