| 摘要 |
The device has a deformable cavity (20) formed in a layer or a substrate and extended along a plane of the device, where the cavity is delimited by a movable or deformable side wall (25). An opening transmits depression or pressure pulse, produced in the cavity, to surrounding air. An actuating unit having a set of electrostatic combs (24, 24') actuates a displacement or deformation of the side wall in the plane of the device. An independent claim is also included for a method for forming a micro- and/or nano-electromechanical systems or capacitive micromachined ultrasonic transducer type acoustic energy generating device. |
