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经营范围
发明名称
CHEMICAL VAPOR DEPOSITION SYSTEM
摘要
申请公布号
EP1440179(B1)
申请公布日期
2012.01.25
申请号
EP20020794855
申请日期
2002.08.07
申请人
FIRST SOLAR, INC
发明人
FAYKOSH, GARY, T.;FOOTE, JAMES, B.;HINKLE, JAMES, E.
分类号
C23C16/00;C23C16/44;C03C17/00;C23C16/54;H01L21/31
主分类号
C23C16/00
代理机构
代理人
主权项
地址
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