DENSE RARE EARTH METAL OXIDES COATING TO SEAL THE POROUS CERAMIC SURFACE, AND THE METHOD OF RARE EARTH METAL OXIDES COATING LAYER

摘要

PURPOSE: Dense rare earth metal oxides coating for sealing a porous ceramic surface and a manufacturing method thereof are provided to secure the withstanding voltage characteristic and plasma corrosion resistance of a substrate by forming a thick porous ceramic coating layer and dense rare earth metal oxides coating on the substrate. CONSTITUTION: A method for manufacturing dense rare earth metal oxides coating for sealing a porous ceramic surface comprises a first step of forming a porous ceramic coating layer on a substrate through a plasma spray process, a second step of processing the porous ceramic coating layer to have an average surface roughness of 0.4-2.3μm, and coating rare earth metal oxides on the porous ceramic coating with an aerosol deposition method with a density of 90% or more.