| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of removing a pellicle from a mask in which one operator can easily remove a pellicle including a large-sized pellicle from the mask without damaging the mask and differences in skills by operators do not hardly make differences in accomplishment degree of operation, and to provide a gap holding jig used for the removal. Ž<P>SOLUTION: The gap holding jig 100 maintains a gap between a frame body 1 of the pellicle and the mask after the frame body is peeled from the mask when the pellicle 3 is removed from the mask 4. The gap holding jig has two plate type bodies 5 coupled together by a hinge 7 opposite each other, and has a clip portion 10 where one-end sides of the plate bodies 5 are elastically energized with the hinge as a rotary shaft 8. At least one plate like body 5a out of the two plate-like bodies 5 has a semielliptic or semicolumnar projection portion 11 extending in a direction parallel to the rotary shaft of the hinge on the side of a clip surface 12a of the clip portion. Ž<P>COPYRIGHT: (C)2009,JPO&INPIT Ž</p> |
