发明名称 |
Multi-chamber gas discharge laser bandwidth control through discharge timing |
摘要 |
A method and apparatus are disclosed for controlling bandwidth in a multi-portion laser system comprising a first line narrowed oscillator laser system portion providing a line narrowed seed pulse to an amplifier laser system portion, may comprise utilizing a timing difference curve defining a relationship between a first laser system operating parameter other than bandwidth and the timing difference and also a desired point on the curve defining a desired timing difference, wherein each unique operating point on the curve corresponds to a respective bandwidth value; determining an actual offset from the timing difference at the desired point on the curve to an actual operating point on the curve; determining an error between the actual offset and a desired offset corresponding to a desired bandwidth; modifying the firing differential timing to remove the error between the actual offset and the desired offset. |
申请公布号 |
US8102889(B2) |
申请公布日期 |
2012.01.24 |
申请号 |
US20100806308 |
申请日期 |
2010.08.10 |
申请人 |
JACQUES ROBERT N.;PARTLO WILLIAM N.;BROWN DANIEL J. W.;CYMER, INC. |
发明人 |
JACQUES ROBERT N.;PARTLO WILLIAM N.;BROWN DANIEL J. W. |
分类号 |
H01S3/00 |
主分类号 |
H01S3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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